Fishing – trapping – and vermin destroying
Patent
1990-06-07
1992-06-30
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
156643, 445 50, H01L 21465
Patent
active
051262878
ABSTRACT:
A method of fabricating electron field emitters is disclosed. In this method, a semiconductor substrate is provided with at least one set of alternating conductor and insulator layers formed thereon. An etch is then performed through the at least one set of alternating conductor and insulator layers to form an aperture. An etch resistant layer is formed on the area exposed from the previous etch at the base of the aperture. An etch is performed forming the electron emitter in the one face aligned to the exposed area. The emitter is thereby self-aligned to the overlying conductor and insulator layers. The conductor and insulator layers need not be aligned to an underlying emitter.
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Chaudhuri Olik
MCNC
Trinh Loc Q.
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