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Method for fine patterning of a polymeric film

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
Patent

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Method for forming a filter

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for forming a fine pattern of a semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Masking of sidewall
Reexamination Certificate

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Method for forming a micro-pattern on a substrate

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Method for forming contact hole on semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for forming fine grooves and stamper and structure...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Method for forming micro patterns of semiconductor devices

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for forming pattern

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for making a sculptured diaphragm

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Method for manufacturing a semiconductor device with ultra-fine

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Method for manufacturing porous structure and method for...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for manufacturing printing plate

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for manufacturing semiconductor integrated circuit...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for pattern formation

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for patterning high density field emitter tips

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Reexamination Certificate

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Method for patterning high density field emitter tips

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Reexamination Certificate

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Method for patterning high density field emitter tips

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Reexamination Certificate

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Method for pitch reduction

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Masking of sidewall
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