Method for making a sculptured diaphragm

Details Method for making a sculptured diaphragm Method for making a sculptured diaphragm

1996-03-04

1999-03-30

Nguyen, Nam

Etching a substrate: processes

Masking of a substrate using material resistant to an etchant

216 2, 438759, 430319, 430320, B44C 122

Patent

active

058884122

ABSTRACT:
A sculptured diaphragm of a sensor is fabricated by providing a semiconductor material, forming at least one cavity on the front side of the semiconductor material, forming a diaphragm layer over the semiconductor material, and the etching a cavity on the back side of the semiconductor material. If a sensor having a diaphragm with a central boss is desired, then the diaphragm layer is planarized to form a thick and a thin portion in the diaphragm layer.

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