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Aligning polymer films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Anisotropic liquid phase photochemical etch

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is exposed to nonimaging radiation
Patent

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Anisotropic wet etching of silicon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Apparatus and method for patterning a surface

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Application of semiconductor IC fabrication techniques to the ma

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Applying imprinting material to substrates employing...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Bilayered metal hardmasks for use in Dual Damascene etch...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Chamber, at least for the transport of workpieces, a chamber com

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Coated beads and process utilizing such beads for forming an etc

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Coated beads and process utilizing such beads for forming an...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Coated beads and process utilizing such beads for forming an...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Combined wet etching method for stacked films and wet...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Composition, membrane, and associated method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Controlled diffusion partial etching

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Cooling device of a planar light source

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Debris-free wafer marking method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Device manufacturing method and computer program product

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Dry developing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Dry dispense of particles to form a fabrication mask

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Dry etching method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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