Highly selective high aspect ratio oxide etch method and product
Highly selective process for etching oxide over nitride...
Honeycomb optical window deposition shield and method for a...
In situ plasma process to remove fluorine residues from the...
In-situ bake step in plasma ash process to prevent corrosion
Inductive plasma reactor
Inductively coupled plasma downstream strip module
Isotropic dry cleaning process for noble metal integrated...
Laser assisted cryoetching
Laser machined slider
Laser removal of layer or coating from a substrate
Laser stripping improvement by modified gas composition
Laser-induced etching of multilayer materials
Low ceiling temperature process for a plasma reactor with...
Low density high frequency process for a parallel-plate electrod
Low frequency inductive RF plasma reactor
Magnetic barrier for plasma in chamber exhaust
Manufacturing method of semiconductor device
Method and an electrode system for excitation of a plasma
Method and apparatus for achieving etch rate uniformity in a rea