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Electrostatic actuator for microelectromechanical systems...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Etching method

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Etching method in fabrications of microstructures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Etching to form cross-over, non-intersecting channel networks fo

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication and controlled release of structures using...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of a microchannel plate from a perforated silicon

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of a reflective spatial light modulator

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of a surface micromachined capacitive microphone usi

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of electronic magnetic, optical, chemical, and...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of etched features

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of MEMS devices with spin-on glass

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of microchip drug delivery devices

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of molecular scale devices using fluidic assembly

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of single-crystal silicon structures using sacrifici

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of suspended structures using a sacrificial layer

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fabrication of three dimensional structures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fiducial marks for charged-particle-beam exposure apparatus and

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Flexural plate wave sensor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Fluorochemical treatment for silicon articles

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Formation of atomic scale vertical features for topographic inst

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