Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1995-05-31
1997-10-28
Breneman, R. Bruce
Etching a substrate: processes
Etching of semiconductor material to produce an article...
216 41, 216 51, 216 56, 216 96, 216 97, 216 99, 4352872, C03C 1500
Patent
active
056814844
ABSTRACT:
A system for processing a plurality of tests or syntheses in parallel comprising a sample channel for moving samples into a microlaboratory array of a plurality of wells connected by one or more channels for the testing-or synthesis of samples, a station for housing the array and an optical system comprising at least one light source and at least one light detector for measuring the samples in the array, and a means of electrically connecting said array to an apparatus capable of monitoring and controlling the flow of fluids into the array. Samples are loaded from a common loading channel into the array, processed in the wells and measurements taken by the optical system. The array can process many samples, or synthesize many compounds in parallel, reducing the time required for such processes. Etching from both sides of a substrate using patterned photoresist and metal layers to form a network of capillary channels for separately transporting a plurality of different liquids. The channels can cross over each other without intersecting.
REFERENCES:
patent: 3494723 (1970-02-01), Gray
patent: 3615241 (1971-10-01), Low et al.
patent: 4276048 (1981-06-01), Leaback
patent: 4385115 (1983-05-01), de Zabala et al.
patent: 4417946 (1983-11-01), Bohlen et al.
patent: 4495025 (1985-01-01), Haskell
patent: 4533430 (1985-08-01), Bower
patent: 4589952 (1986-05-01), Behringer et al.
patent: 4683914 (1987-08-01), Brisland
patent: 4753775 (1988-06-01), Ebersole et al.
patent: 4756884 (1988-07-01), Hillman et al.
patent: 4891120 (1990-01-01), Sethi et al.
patent: 4908112 (1990-03-01), Pace
patent: 4948961 (1990-08-01), Hillman et al.
patent: 4960486 (1990-10-01), Perkins et al.
patent: 4963498 (1990-10-01), Hillman et al.
patent: 4981552 (1991-01-01), Mikkor
patent: 4999283 (1991-03-01), Zavos et al.
patent: 4999284 (1991-03-01), Ward et al.
patent: 4999286 (1991-03-01), Gawel et al.
patent: 5000817 (1991-03-01), Aine
patent: 5001048 (1991-03-01), Taylor et al.
patent: 5003822 (1991-04-01), Joshi
patent: 5006749 (1991-04-01), White
patent: 5063081 (1991-11-01), Cozzette et al.
patent: 5066938 (1991-11-01), Kobashi et al.
patent: 5073029 (1991-12-01), Eberly et al.
patent: 5087930 (1992-02-01), Roy et al.
patent: 5112455 (1992-05-01), Cozzette et al.
patent: 5118384 (1992-06-01), Harmon et al.
patent: 5129261 (1992-07-01), Riley
patent: 5129262 (1992-07-01), White et al.
patent: 5140161 (1992-08-01), Hillman et al.
patent: 5141868 (1992-08-01), Shanks et al.
patent: 5143854 (1992-09-01), Pirrung et al.
patent: 5144139 (1992-09-01), Hillman et al.
patent: 5147607 (1992-09-01), Mochida
patent: 5156810 (1992-10-01), Ribi
patent: 5164598 (1992-11-01), Hillman et al.
patent: 5176203 (1993-01-01), Larzul
patent: 5188963 (1993-02-01), Stapleton
patent: 5189914 (1993-03-01), White et al.
patent: 5194133 (1993-03-01), Clark et al.
patent: 5200051 (1993-04-01), Cozzette et al.
patent: 5204525 (1993-04-01), Hillman et al.
patent: 5205902 (1993-04-01), Horton et al.
patent: 5212988 (1993-05-01), White et al.
patent: 5220189 (1993-06-01), Higashi et al.
patent: 5229297 (1993-07-01), Schnipelsky et al.
patent: 5230864 (1993-07-01), Columbus
patent: 5238853 (1993-08-01), Calzi et al.
patent: 5241363 (1993-08-01), Garner
patent: 5250263 (1993-10-01), Manz
patent: 5252743 (1993-10-01), Barrett et al.
patent: 5262127 (1993-11-01), Wise et al.
patent: 5270170 (1993-12-01), Schatz et al.
patent: 5277754 (1994-01-01), Hadimioglu et al.
patent: 5288463 (1994-02-01), Chemelli
patent: 5296114 (1994-03-01), Manz
patent: 5296375 (1994-03-01), Kricka et al.
patent: 5304487 (1994-04-01), Wilding et al.
patent: 5312590 (1994-05-01), Gunasingham
patent: 5324483 (1994-06-01), Cody et al.
patent: 5324633 (1994-06-01), Foder et al.
patent: 5327777 (1994-07-01), Kaye et al.
patent: 5359115 (1994-10-01), Campbell et al.
patent: 5384261 (1995-01-01), Winkler et al.
patent: 5412087 (1995-05-01), McGall et al.
patent: 5420328 (1995-05-01), Campbell
patent: 5424186 (1995-06-01), Fodor et al.
patent: 5427946 (1995-06-01), Kricka et al.
patent: 5463564 (1995-10-01), Agrafiotis et al.
patent: 5585011 (1996-12-01), Saaski et al.
Andreas Manz et al., Trends in Analytical Chemistry, 10(5):144-148 (1991).
Richeter et al., A Micromachined Electrohydrodynamiic (EHD) Pump, Sensors and Actuators A, 29:159-168, 1992.
Bart et al., Microfabricated Electrohydrodynamic Pumps, Sensors and Actuators, A21-A23:193-197, 1990.
Melcher, Traveling-Wave Induced Electroconvection, The Physics of Fluids, 9:1548-1555, 1966.
Pickard, Ion Drag Pumping. I. THEORY, J. Applied Physics 34:246-250, 1963.
Pickard, Ion Drag Pumping. II. Experiment, J. Applied Physics, 34:251-258, 1963.
Stuetzer, Ion Drag Pumps, J. Applied Physics, 31:136-146, 1960.
Tracey, et al., Microfabricated Microhaemorheomete pp. 82-84, 1991.
Medynski, Synthetic Peptide Combinatorial Libraries, Bio/Technology, vol. 12, Jul. 1994.
Jacobson et al., Precolumn Reactions With Electrophoretic Analysis Integrated on a Microchip, Anal, Chem., 66:4127-4123, 1994.
Jacobson, et al., Effects of Injection Schemes and Column Geometry on the Performance of Microchip Electrophoresis Devices, Anal. Chem. 1994, 66:1107-1113.
Jacobson, et al., High-Speed Separations on a Microchip, anal. Chem. 1994, 66:1114-1118.
Fan, et al., Micromachining of Capillary Electrophoresis Injectors and Separators on Glass Chips and Evaluation of Flow at Capillary Intersections, Anal. Chem., 1994, 6:177-184.
Megregany, Microelectromechanical Systems, Circuits and Devices, Jul. 1993.
Harrison, et al., Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip, Science, vol. 261, Aug. 13, 1993.
Harrison, et al., Capillary Electrophoresis and Sample Injection Systems Integrated on a Planar Glass Chip, Anal. Chem. 1992, 64:1926-1932.
Fisher, Microchips for Drug Compounds, New York times, Mar. 3, 1991.
Fodor, et al., Light-Directed, Spatially Addressable Parallel Chemical Synthesis, Research Article, Science, vol. 251, Feb. 15, 1991, pp. 767-773.
The Silver Shotguns, The Economist, Dec. 14-20, 1991.
Howe, et al., Silicon Micromechanics; Sensors and Actuators on a Chip, IEEE Spectrum, Jul. 1990.
Wenzel, et al., A Multisensor Employing an Ultrasonic Lamb-Wave Oscillator, IEEE Transactions on Electron Devices, vol. 35, No. 5, Jun. 1988.
Angell, et al., Silicon Micromechanical Devices, Scientific American 248:44-55, 1983.
Petersen, Silicon as a Mechanical Material, Proceedings of the IEEE, vol. 79, No. 5, May 1982.
Search Report for WO 93/22421, Nov. 11, 1993.
Search Report for WO 93/22055, Nov. 11, 1993.
Search Report for WO 93/22054, Nov. 11, 1993.
Search Report for WO 93/22053, Nov. 11, 1993.
Gazette entry for Tsui et al., Variable Range Position Indicator, U.S. Pat. No. 5,345,215, Jun. 17, 1993.
Gazette entry for Murphy et al., Automated Capillary Scanning Systems, U.S. Pat. No. 5,009,003, Feb. 14, 1990.
Woolley et al., Ultra-High-Speed DNA Fragment Separations Using Microfabricated Capillary Array Electrophoresis Chips, Proc. Natl. Acad. Sci. USA 91:11348-11352, Nov. 1994.
Dasgupta et al., Electroosmosis: A Reliable Fluid Propulsion System for Flow Injection Analysis, Anal. Chem. 66:1792-1798, 1994.
Harmon et al., Selectivity in Electrophoretically Mediated Microanalysis by Control of Product Detection Time, Anal. Chem. 66:3797-3805, 1994.
Patterson, et al., Electrophoretically Mediated Microanalysis of Calcium, Journal of Chromatography A, 662:389-395, 1994.
Microfabricated Device is Chemistry Lab on a Chip, Chemical & Engineering News.
Harmon et al., Mathematical Treatment of Electrophoretically Mediated Microanalysis, Anal. Chem. 65:2655-2662, 1993.
Avila and Whitesides, Catalytic Activity of Native Enzymes During Capillary Electrophoresis: An Enzymatic Microreactor, J. Org. Chem. 58:5508-5512, 1993.
Harmon, et al., Electrophoretically Mediated Microanalysis of Ethanol, J. Chromatog. A, 657:429-434, 1993.
Bao and Regnier, Ultramicro Enzyme Assays in a Capillary Electrophoretic System, J. Chrom. 608:217-224, 1992.
Fan, Z.H. et al "Micromachining of Capillary Electrophoresis Injectors and Separators o
Cherukuri Satyam Choudary
McBride Sterling Edward
Zanzucchi Peter John
Alanko Anita
Breneman R. Bruce
Burke W. J.
David Sarnoff Research Center Inc.
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