Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate
2007-01-09
2007-01-09
Olsen, Allan (Department: 1763)
Etching a substrate: processes
Etching of semiconductor material to produce an article...
C216S059000, C216S065000, C216S066000, C204S192100, C204S192110, C204S192130, C204S192330, C204S192340, C219S121600, C250S492100, C250S492300, C427S457000
Reexamination Certificate
active
10301208
ABSTRACT:
The present disclosure relates to a method for generating a three-dimensional microstructure in an object. In one embodiment, a method for fabricating a microscopic three-dimensional structure is provided. A work piece is provided that includes a target area at which the three-dimensional structure is to be fabricated. The target area has a plurality of virtual dwell points. A shaped beam is provided to project onto the work piece. The intersection of the shaped beam with the work piece defines a beam incidence region that has a desired shape. The beam incidence region is sufficiently large to encompass multiple ones of the virtual dwell points. The shaped beam is moved across the work piece such that different ones of the virtual dwell points come into it and leave it as the beam moves across the work piece thereby providing different doses to different ones of the virtual dwell points as the different dwell points remain in the beam incidence region for different lengths of time during the beam scan. In this way, a desired dose array of beam particles is applied onto the target area to form the three dimensional microstructure.
REFERENCES:
patent: 4418283 (1983-11-01), Trotel
patent: 4876112 (1989-10-01), Kaito et al.
patent: 4914304 (1990-04-01), Koyama
patent: 5051556 (1991-09-01), Sakamoto et al.
patent: 5099133 (1992-03-01), Yamada
patent: 5173582 (1992-12-01), Sakamoto et al.
patent: 5389196 (1995-02-01), Bloomstein et al.
patent: 5435850 (1995-07-01), Rasmussen
patent: 5589042 (1996-12-01), Robinson et al.
patent: 5759423 (1998-06-01), Sohda et al.
patent: 5827786 (1998-10-01), Puretz
patent: 5851413 (1998-12-01), Casella et al.
patent: 5868952 (1999-02-01), Hatakeyama et al.
patent: 6011269 (2000-01-01), Veneklasen et al.
patent: 6437347 (2002-08-01), Hartley et al.
patent: 6455863 (2002-09-01), Babin et al.
patent: 2001/0045525 (2001-11-01), Gerlach et al.
patent: 2002/0151140 (2002-10-01), Nakasugi
patent: 2003/0107008 (2003-06-01), Wakimoto
patent: 2004/0178366 (2004-09-01), Ando et al.
patent: 06264272 (1994-09-01), None
patent: 09246142 (1997-09-01), None
FEI Company
Hilgers, Bell & Richards LLP
Olsen Allan
Scheinberg Michael O.
LandOfFree
Fabrication of three dimensional structures does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Fabrication of three dimensional structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication of three dimensional structures will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3789031