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Vertical heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical heat treatment apparatus and method of transferring...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Vertical heat treatment apparatus with a circulation gas passage

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical heat treatment apparatus with a rotary holder turning i

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical heat treatment device for semiconductor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical heat-treatment apparatus for semiconductor parts

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical load-lock reduced-pressure type chemical vapor depositi

Coating apparatus – Gas or vapor deposition
Patent

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Vertical low pressure CVD apparatus with an adjustable nozzle

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical LPCVD furnace with reversible manifold collar and metho

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vertical LPCVD reactor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical oven with a boat for the uniform treatment of wafers

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vertical plasma enhanced process apparatus and method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vertical processing unit

Coating apparatus – Gas or vapor deposition
Patent

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Vertical semiconductor processor

Coating apparatus – Gas or vapor deposition – Running length work
Patent

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Vertical thermal processing apparatus and method of using...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vertical thermal treatment apparatus

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vertical treating apparatus having a restricting means for avoid

Coating apparatus – Gas or vapor deposition
Patent

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Vertical two chamber reaction furnace

Coating apparatus – Gas or vapor deposition – Running length work
Patent

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Vertical type diffusion apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertical type semiconductor device producing apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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