Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2011-05-03
2011-05-03
Ahmed, Shamim (Department: 1713)
Coating apparatus
Gas or vapor deposition
With treating means
C118S715000, C118S722000, C427S096800, C156S345370
Reexamination Certificate
active
07935188
ABSTRACT:
The invention is a vertical thermal processing apparatus including: a processing container that contains an object to be processed; a main heater provided so as to surround the processing container, the main heater being capable of heating the processing container and having a rapid cooling function; a gas-discharging part formed at an upper portion of the processing container, the gas-discharging part being bent; an auxiliary heater provided so as to heat the gas-discharging part; a moving mechanism for evacuating the auxiliary heater away from the gas-discharging part during a rapid cooling process of the main heater; and a forcibly gas-discharging mechanism for forcibly discharging an atmospheric gas in a vicinity of the gas-discharging part.
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Inoue Hisashi
Nakajima Wataru
Oikawa Takuya
Ahmed Shamim
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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