Coating apparatus – Gas or vapor deposition – With treating means
Patent
1993-08-11
1995-10-17
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118715, 118725, C23C 1600
Patent
active
054586852
ABSTRACT:
The present invention relates to a heat treatment apparatus wherein treatment objects such as semiconductor wafers contained in a treatment boat are loaded in a treatment container such as a process tube. Water vapor is supplied from the top of the treatment container toward the bottom for heat treatment of the treatment objects to permit water vapor passage between the treatment container top and the top face of the heat treatment boat. A gas diffusion plate possessing for example 16 flow holes is provided, moreover, a heat treatment space is formed at the bottom direction of the gas diffusion plate. These flow holes are arranged at equal intervals in the circumference direction of a space between the outer circumference of the treatment objects held by the heat treatment boat and the inner side of the treatment container. As a result of this type of construction, the supplied treatment gas (water vapor) can quickly and completely cover all of a plurality of treatment objects contained horizontally at equal spacing in the vertical direction of the heat treatment apparatus to enable uniform heat treatment.
REFERENCES:
patent: 4290385 (1981-09-01), Nakanisi
patent: 4798165 (1989-01-01), deBoar
patent: 4825809 (1989-05-01), Mieno
patent: 4891335 (1990-01-01), MCNeilly
patent: 4989540 (1991-02-01), Fuse
patent: 5058526 (1991-10-01), Matsushita
patent: 5088922 (1992-02-01), Kakizaki
patent: 5268034 (1993-12-01), Vukelic
patent: 5279670 (1994-01-01), Watanabe
patent: 5303671 (1994-04-01), Kondo
English language Abstract for Laid-Open Publication No. 61-114522.
Hasebe Kazuhide
Sukekawa Keiji
Takahashi Nobuaki
Breneman R. Bruce
Lund Jeffrie R.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
LandOfFree
Vertical heat treatment apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vertical heat treatment apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vertical heat treatment apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-593707