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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical vaporizer for halide-free, silcon-containing compounds

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Vertical wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical wafer boat

Coating apparatus – Gas or vapor deposition
Patent

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Vertically oriented CVD apparatus including gas inlet tube havin

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vertically-stacked process reactor and cluster tool system for a

Coating apparatus – Gas or vapor deposition
Patent

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Very large area/volume microwave ECR plasma and ion source

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vessel for growing thin films by isothermal vapor phase epitaxy

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Via filling by selective laser chemical vapor deposition

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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View port of a chemical vapor deposition device for...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Voltage non-uniformity compensation method for high...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Voltage non-uniformity compensation method for high...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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