Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1993-01-22
1993-11-30
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
118728, C23C 1424
Patent
active
052661180
ABSTRACT:
A growth vessel (10) comprises a crucible (12) for containing the source materials within its cavity (26), a substrate carrier (15, 115) positioned on inner shoulder 27 of the crucible sidewalls (22-25), a source tray (14) positioned within the crucible cavity (26), at least one spacer (13) positioned between the bottom of the crucible cavity (26) and the source tray (14), a substrate carrier (15, 115) positioned within the crucible cavity (26) for mounting a substrate parallel to the source of growth material in the source tray (14), and a crucible lid (17, 117).
REFERENCES:
patent: 3462323 (1969-08-01), Groves
patent: 4447470 (1984-05-01), Kay
patent: 4762576 (1988-08-01), Wilson et al.
Wang, Shin, Chu, Lanir and Vanderwyck, "Liquid Phase Growth of HgCdTe Epitaxial Layers", J. Electrochem. Soc. 127, pp. 175-179, Jan., 1980.
Shin and Pasko, "Open-Tube Isothermal Vapor Phase Epitaxy of Hg.sub.1-x Cd.sub.x Te on CdTe", Appl. Phys. Lett., 44 (4), pp. 423-425, Feb. 15, 1984.
"Semiconductor/Opto-Electronic Grades", published by Poco Graphite, Inc., 4 pages, Mar., 1989.
"Fabmate", published by Poco Graphite, Inc., 2 pages, publication date unknown.
Bueker Richard
Loral Vought Systems Corporation
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