Voltage non-uniformity compensation method for high...

Details Voltage non-uniformity compensation method for high... Voltage non-uniformity compensation method for high...

2010-02-19

2011-11-15

Kackar, Ram (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345430, C156S345470

Reexamination Certificate

active

08056504

ABSTRACT:
A vacuum vessel and at least two electrodes define an internal process space. At least one power supply is connectable with the electrodes. A substrate holder holds a substrate to be treated in the internal process space. At least one of the electrodes has along a first cross section a concave profile and has along a second cross section a convex profile, the first cross section being parallel to the second cross section. Gas is provided to the space through a gas inlet. Power is provided to the electrodes and the substrate is treated.

REFERENCES:
patent: 4342901 (1982-08-01), Zajac
patent: 4885074 (1989-12-01), Susko et al.
patent: 5203980 (1993-04-01), Cremer et al.
patent: 5292394 (1994-03-01), Cord et al.
patent: 5628869 (1997-05-01), Mallon
patent: 5695566 (1997-12-01), Suzuki et al.
patent: 5718769 (1998-02-01), Hashizume et al.
patent: 5820947 (1998-10-01), Itoh
patent: 5904487 (1999-05-01), Conboy et al.
patent: 5938854 (1999-08-01), Roth
patent: 5997686 (1999-12-01), Lardon et al.
patent: 6183565 (2001-02-01), Granneman et al.
patent: 6228438 (2001-05-01), Schmitt
patent: 6294227 (2001-09-01), Anma et al.
patent: 6631692 (2003-10-01), Matsuki et al.
patent: 2001/0022996 (2001-09-01), Yajima et al.
patent: 2002/0129902 (2002-09-01), Babayan et al.
patent: 2003/0089314 (2003-05-01), Matsuki et al.
patent: 2005/0241583 (2005-11-01), Buechel et al.
patent: 10134513 (2003-01-01), None

Affiliated with

Also associated with

Rating

Voltage non-uniformity compensation method for high... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Voltage non-uniformity compensation method for high..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Voltage non-uniformity compensation method for high... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4298071