Thin-film deposition evaporator

Thin-film deposition system

Thin-film disposition apparatus

Thin-film forming apparatus with magnetic bearings and a non-con

Thin-film vapor deposition apparatus

Thin-film vapor deposition apparatus

Three-dimensional micro fabrication device for filamentary subst

Three-dimensional showerhead apparatus

Throttle valve providing enhanced cleaning

Throughput enhancement for single wafer reactor

Tool and method for in situ vapor phase deposition source...

Toroidal plasma source for plasma processing

Toroidal plasma source for plasma processing

Transfer apparatus and accommodating apparatus for...

Transfer arm apparatus and semiconductor processing system using

Translational target assembly for thin film deposition system

Transport device for substrates to be coated in a vacuum coating

Transporting device with roller systems for vacuum-coating insta

Trap apparatus

Trap apparatus