Coating apparatus – Gas or vapor deposition – Work support
Patent
1986-09-26
1988-08-23
McIntosh, John P.
Coating apparatus
Gas or vapor deposition
Work support
118 50, 118503, 198624, 198836, 204298, B05C 1302
Patent
active
047652730
ABSTRACT:
Transporting device for vacuum coating installations with several stations and with roller systems (3, 4) for the guidance and advance of essentially two-dimensional substrate holders (1) in a vertical position along a given transporting path through the stations. To avoid interference with the coating process by falling layer material, the substrate holders (1) are guided exclusively in the area of their lower edge (2) by roller systems (3, 4). In a preferred example of the operation, guide rollers are disposed in pairs in the area of the lower edge (2) of the substrate holders (1), the substrate holder (1) being held between said guide rollers. The guide rollers (5, 6) are rotatable about vertical axes A1, A2.
REFERENCES:
patent: 3132785 (1964-05-01), Kunz
patent: 3360260 (1967-12-01), Rapparlie et al.
patent: 4042128 (1977-08-01), Shrader
patent: 4187801 (1980-02-01), Monk
Leybold-Heraeus GmbH
McIntosh John P.
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