Transport device for substrates to be coated in a vacuum coating

Details Transport device for substrates to be coated in a vacuum coating Transport device for substrates to be coated in a vacuum coating

1995-05-24

1996-09-17

Kunemund, Robert

Coating apparatus

Gas or vapor deposition

Work support

118500, 118503, 118729, 20429815, 20429823, C23C 1600, C23C 1456

Patent

active

055564771

ABSTRACT:
A substrate carrier plate (17, 17a) designed to hold at least one substrate is removably attached to a support element (19, 19a) of a base (2). The carrier plate is held to the support element (19, 19a) at least at one point by a centering pin (22, 23; 22a, 23a), which projects from the plate of the support element (19) and fits into a hole (24, 25) in the substrate carrier plate (17), and at least at one other point by a clamping device (18, 18a). The clamping device (18, 18a) is held on a control part (11) on the base (2) in such a way that it can be moved by the displacement of an actuating arm (21) between a clamping position and a release position, and it is also provided with a tensioning roller (14), which is supported on a ramp (15, 15a) on the substrate carrier plate (17). The substrate carrier plate (17) has an opening (20, 20a) to allow the passage of the tensioning roller (14), the tensioning roller (14, 14a) being located behind this opening when in its release position. A kickover spring (9) holds the tensioning rollers (14, 14a) under pretension in one stable position when in the tensioning position and under pretension in another stable position when in the release position.

REFERENCES:
patent: 4317427 (1982-03-01), Turner
patent: 4473455 (1984-09-01), Dean
patent: 4647266 (1987-03-01), Coad et al.
patent: 4847119 (1989-07-01), Chin
patent: 4919076 (1990-04-01), Lutz
patent: 4971676 (1990-11-01), Doue
patent: 4978412 (1990-12-01), Aoki
patent: 5124019 (1992-06-01), Kunkel
patent: 5192087 (1993-03-01), Kawashima
patent: 5393349 (1995-02-01), Ohkase

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