Thin-film disposition apparatus

Details Thin-film disposition apparatus Thin-film disposition apparatus

2007-09-11

2007-09-11

Moore, Karla (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S7230AN, C156S345330, C156S345340

Reexamination Certificate

active

09862458

ABSTRACT:
A dividing plate for a thin-film deposition apparatus divides the interior of the vacuum reaction chamber into a plasma discharge space and a film deposition process space, by fixing or connecting a plurality of laminated plates together by securely bonding them over the entire area of their interfacial surfaces, or a large portion thereof.

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