Thin-film deposition evaporator

Details Thin-film deposition evaporator Thin-film deposition evaporator

2004-05-17

2009-11-03

Lund, Jeffrie R (Department: 1792)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C118S7230VE, C118S715000

Reexamination Certificate

active

07611587

ABSTRACT:
A material source evaporator for use with an evacuable interior deposition chamber in which evaporated materials are deposited on substrates comprising a container with an associated heater that can heat an vaporizable material provided in the container to provide a vapor thereof. A manifold having a plurality of output apertures also has an associated heater that can heat the material vapor provided in the manifold to remain sufficiently vaporous to pass out of output apertures which are in a selected pattern to provide a calibrated spatial distribution of material vapor that results in a deposition thereof in a layer on an adjacent substrate in a fixed position. Thus, the layer has a relatively uniform thickness.

REFERENCES:
patent: 4488506 (1984-12-01), Heinecke et al.
patent: 5336324 (1994-08-01), Stall et al.
patent: 5451258 (1995-09-01), Hillman et al.
patent: 5595606 (1997-01-01), Fujikawa et al.
patent: 5670212 (1997-09-01), Staring et al.
patent: 6086677 (2000-07-01), Umotoy et al.
patent: 6190732 (2001-02-01), Omstead et al.
patent: 6410432 (2002-06-01), Hautala et al.
patent: 2002/0197418 (2002-12-01), Mizukami et al.
patent: 2003/0054099 (2003-03-01), Jurgensen et al.
patent: 2003/0192471 (2003-10-01), Jurgensen et al.
patent: 2001-279450 (2001-10-01), None
patent: 2002-030418 (2002-01-01), None
patent: 2002-249868 (2002-09-01), None
patent: WO 01/61071 (2001-08-01), None
patent: WO 02/27064 (2002-04-01), None
Random House Webster's Unabridged Dictionary, Second Ed., 2001, pp. 455, 603 and 2105.

Affiliated with

Also associated with

Rating

Thin-film deposition evaporator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin-film deposition evaporator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin-film deposition evaporator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4126396