High density plasma CVD reactor with combined inductive and...
High density plasma deposition and etching apparatus
High density plasma deposition and etching apparatus
High density plasma process chamber
High density plasmas
High efficiency electro-static chucks for semiconductor...
High flow conductance and high thermal conductance...
High frequency magnetron plasma apparatus
High impedance plasma ion implantation apparatus
High penetration deposition process and apparatus
High pressure release device for semiconductor fabricating equip
High rate atomic layer deposition apparatus and method of using
High rate, low temperature silicon deposition system
High resolution substrate holder leveling device and method
High speed apparatus for forming capacitors
High temperature ALD inlet manifold
High temperature ceramic heater assembly with RF capability
High temperature chemical vapor deposition chamber
High temperature electrostatic chuck
High temperature filter for CVD apparatus