High resolution substrate holder leveling device and method

Details High resolution substrate holder leveling device and method High resolution substrate holder leveling device and method

2005-04-29

2009-08-11

Cleveland, Michael (Department: 1792)

Coating apparatus

Gas or vapor deposition

Work support

C248S188400, C033S814000

Reexamination Certificate

active

07572340

ABSTRACT:
A device for adjusting a spacing between a chamber body such as a chamber body and a leveling plate such as a leveling plate comprises a mounting stud configured to be mounted to the chamber body. The mounting stud includes a stud threaded surface. A bushing is capable of being fixed to the leveling plate, and includes a bushing threaded surface. An adjustment screw has a first threaded surface threadingly engaged with the stud threaded surface of the mounting stud, and a second threaded surface threadingly engaged with the bushing threaded surface of the bushing. The threaded surfaces are configured, when the bushing is fixed to the leveling plate and the adjustment screw is turned, to cause the adjustment screw to move in a first direction with respect to the mounting stud at a first rate and the bushing to move in a second direction opposite from the first direction with respect to the adjustment screw at a second rate which is different from the first rate.

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