High temperature ALD inlet manifold

Details High temperature ALD inlet manifold High temperature ALD inlet manifold

2011-04-05

2011-04-05

Lund, Jeffrie R (Department: 1716)

Coating apparatus

Gas or vapor deposition

C156S345290, C156S345330, C156S345340

Reexamination Certificate

active

07918938

ABSTRACT:
A system and method for distributing one or more gases to an atomic layer deposition (ALD) reactor. An integrated inlet manifold block mounted over a showerhead assembly includes high temperature (up to 200° C.) rated valves mounted directly thereto, and short, easily purged reactant lines. Integral passageways and metal seals avoid o-rings and attendant dead zones along flow paths. The manifold includes an internal inert gas channel for purging reactant lines within the block inlet manifold

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