Apparatus for supporting a substrate in a reaction chamber
Apparatus for the coating of substrates in a vacuum chamber
Apparatus for thin film growth
Apparatus for transferring a wafer
Apparatus for vapor deposition
Apparatus for vapor-phase growth
Apparatus for weighting a diffusion furnace cantilever
Arrangement comprising a support body and a substrate holder...
Arrangement for transporting a flat substrate in a vacuum...
Auto-centering device for mechanical clamp
Barrel structure for semiconductor epitaxial reactor
Barrel type of epitaxial vapor phase growing apparatus
Bottom purge manifold for CVD tungsten process
Cantilever and cold zone assembly for loading and unloading an o
Carbon film coated member
Carbon nanotube (CNT) extrusion methods and CNT wire and...
Ceramic heater system and substrate processing apparatus...
Ceramic joined body, substrate holding structure and...
Ceramic substrate support
Ceramic-coated heating assembly for high temperature processing