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Apparatus for supporting a substrate in a reaction chamber

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Apparatus for the coating of substrates in a vacuum chamber

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Apparatus for thin film growth

Coating apparatus – Gas or vapor deposition – Work support
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Apparatus for transferring a wafer

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Apparatus for vapor deposition

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Apparatus for vapor-phase growth

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Apparatus for weighting a diffusion furnace cantilever

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Arrangement comprising a support body and a substrate holder...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Arrangement for transporting a flat substrate in a vacuum...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Auto-centering device for mechanical clamp

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Barrel structure for semiconductor epitaxial reactor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Barrel type of epitaxial vapor phase growing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Bottom purge manifold for CVD tungsten process

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Cantilever and cold zone assembly for loading and unloading an o

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Carbon film coated member

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Carbon nanotube (CNT) extrusion methods and CNT wire and...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Ceramic heater system and substrate processing apparatus...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Ceramic joined body, substrate holding structure and...

Coating apparatus – Gas or vapor deposition – Work support
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Ceramic substrate support

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Ceramic-coated heating assembly for high temperature processing

Coating apparatus – Gas or vapor deposition – Work support
Patent

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