Apparatus for supporting a substrate in a reaction chamber

Apparatus for the coating of substrates in a vacuum chamber

Apparatus for thin film growth

Apparatus for transferring a wafer

Apparatus for vapor deposition

Apparatus for vapor-phase growth

Apparatus for weighting a diffusion furnace cantilever

Arrangement comprising a support body and a substrate holder...

Arrangement for transporting a flat substrate in a vacuum...

Auto-centering device for mechanical clamp

Barrel structure for semiconductor epitaxial reactor

Barrel type of epitaxial vapor phase growing apparatus

Bottom purge manifold for CVD tungsten process

Cantilever and cold zone assembly for loading and unloading an o

Carbon film coated member

Carbon nanotube (CNT) extrusion methods and CNT wire and...

Ceramic heater system and substrate processing apparatus...

Ceramic joined body, substrate holding structure and...

Ceramic substrate support

Ceramic-coated heating assembly for high temperature processing