Apparatus for full wafer deposition

Apparatus for growing group II-VI mixed compound semiconductor

Apparatus for growing single-crystalline semiconductor film

Apparatus for growing thin films

Apparatus for holding disk-shaped substrates in the vacuum chamb

Apparatus for holding substrates

Apparatus for improved azimuthal thermal uniformity of a...

Apparatus for improved power coupling through a workpiece in a s

Apparatus for low pressure chemical vapor depostion

Apparatus for manufacturing a semiconductor device having a wafe

Apparatus for manufacturing semiconductor wafers

Apparatus for plasma treatment of semiconductor materials

Apparatus for plasma-supported back etching of a semiconductor w

Apparatus for preventing deposition on frontside peripheral regi

Apparatus for preventing plasma etching of a wafer clamp in semi

Apparatus for producing thin films by low temperature plasma-enh

Apparatus for providing depletion-free uniform thickness CVD thi

Apparatus for reduced-pressure epitaxial growth and method...

Apparatus for reducing entrapment of foreign matter along a...

Apparatus for supporting a substrate and introducing gas flow do