Arrangement comprising a support body and a substrate holder...

Details Arrangement comprising a support body and a substrate holder... Arrangement comprising a support body and a substrate holder...

2007-10-16

2007-10-16

MacArthur, Sylvia (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S500000, C269S021000

Reexamination Certificate

active

10722848

ABSTRACT:
The invention relates to an arrangement comprising a support body with a substrate holder, mounted thereon on a gas bearing with rotating drive. The gas bearing and the rotating drive are formed by gas flowing in through nozzles arranged in the separating gaps between support body and substrate. The support body and the substrate holder are embodied as rings, whereby the rings lie on each other in a self-centering manner and the one ring comprises a ring bead extending into a ring recess on the other ring.

REFERENCES:
patent: 4860687 (1989-08-01), Frijlink
patent: 5270262 (1993-12-01), Switky et al.
patent: 5527393 (1996-06-01), Sato et al.
patent: 5840125 (1998-11-01), Gronet et al.
patent: 6005226 (1999-12-01), Aschner et al.
patent: 6449428 (2002-09-01), Aschner et al.
patent: 6797069 (2004-09-01), Paisley et al.
patent: 62177912 (1987-08-01), None
patent: WO 01/99257 (2001-06-01), None

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