Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2007-05-01
2007-05-01
Kackar, Ram N. (Department: 1763)
Coating apparatus
Gas or vapor deposition
Work support
C118S725000, C156S345510, C156S345520, C219S444100, C219S544000, C361S234000, C279S128000, C501S098400, C501S098600, C501S127000, C501S152000, C501S153000
Reexamination Certificate
active
10276394
ABSTRACT:
A substrate holding structure having excellent corrosion resistance and airtightness, excellent dimensional accuracy and sufficient durability when mechanical or thermal stress is applied thereto is obtained. A holder (1) serving as the substrate holding structure includes a ceramic base (2) for holding a substrate, a protective cylinder (7) joined to the ceramic base (2) and a joining layer (8) positioned therebetween for joining the ceramic base (2) and the protective cylinder (7) to each other. The joining layer (8) contains at least 2 mass % and not more than 70 mass % of a rare earth oxide, at least 10 mass % and not more than 78 mass % of aluminum oxide, and at least 2 mass % and not more than 50 mass % of aluminum nitride. The rare earth oxide or the aluminum oxide has the largest proportional content among the aforementioned three types of components in the joining layer (8).
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Kuibira Akira
Nakata Hirohiko
Natsuhara Masuhiro
Fasse W. F.
Fasse W. G.
Kackar Ram N.
Sumitomo Electric Industries Ltd.
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