Apparatus for holding disk-shaped substrates in the vacuum chamb

Details Apparatus for holding disk-shaped substrates in the vacuum chamb Apparatus for holding disk-shaped substrates in the vacuum chamb

1994-02-25

1994-12-27

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118729, 118730, 118503, 156345, C23C 1600

Patent

active

053761804

ABSTRACT:
A rectangular substrate bed has on its top surface a row of disk-shaped holding members on which disk-shaped substrates are laterally positioned by a frame member having circular openings which expose the substrates. Seals are provided on each holding member so that substrates can be held in place by vacuum. The frame member is fixed to the substrate bed by clamps having pins which are received in bores at opposite ends of the substrate bed and the frame member.

REFERENCES:
patent: 4535835 (1985-08-01), Holden
patent: 4796562 (1989-01-01), Brors
patent: 4823736 (1989-04-01), Post
patent: 5238499 (1983-08-01), van de Ven

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