Apparatus for holding substrates

Details Apparatus for holding substrates Apparatus for holding substrates

1998-02-18

2000-03-14

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118715, 118500, 156345, 269 37, 269 53, 20429815, C23C 1600

Patent

active

060367849

ABSTRACT:
An apparatus for holding substrate includes a base housing. A plurality of pins are set on the top surface of the base housing. Further, the top surface has a plurality of openings through the top surface. The base housing has a first opening set on the bottom portion of one side of the base housing. Lift means is set in the base housing. A support member having an oblique surface structure is provided in the cylindrical housing and can upwardly pass through an opening formed on top of the cylindrical housing. A plate having a plurality of pins formed thereon is connected to the top of the support member. A substrate holder can be separated from the base housing, and the substrate holder includes a plate. A glass substrate is fixed on the plate by means of a plurality of fixers.

REFERENCES:
patent: 4189230 (1980-02-01), Zasio

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