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Method for igniting a plasma in a plasma processing chamber

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method of forming thin film and apparatus therefor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method of holding substrate and substrate holding system

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method of producing high aspect ratio domes by vapor deposition

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Method of producing near-net shape free standing articles by...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Microfeature workpiece processing apparatus and methods for...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Microwave plasma processing apparatus having a vacuum pump...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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MOCVD method and apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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MOCVD reactor system for indium antimonide epitaxial material

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Modified susceptor for barrel reactor

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Modular coating fixture

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Molecular beam epitaxy apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Multi-layer susceptor for rapid thermal process reactors

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Multi-layer susceptor for rapid thermal process reactors

Coating apparatus – Gas or vapor deposition – Work support
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