Method of producing high aspect ratio domes by vapor deposition

Details Method of producing high aspect ratio domes by vapor deposition Method of producing high aspect ratio domes by vapor deposition

2007-07-03

2007-07-03

Johnson, Christina (Department: 1732)

Coating apparatus

Gas or vapor deposition

Work support

C118S725000, C118S050000, C264S081000, C427S565000

Reexamination Certificate

active

10421319

ABSTRACT:
An apparatus for the manufacture of chemical vapor deposited domes. The apparatus has a vapor deposition chamber with a plurality of sides, a base and a top where the base has a reactant port for receiving a flow of chemical reactants. A male mandrel is joined to one of a plurality of sides of the deposition chamber such that the flow of chemical reactants in the vapor deposition chamber does not impinge on the mandrel.

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