IC wiring connecting method and apparatus

ICP reactor having a conically-shaped plasma-generating section

Igniter for microwave energized plasma processing apparatus

Illuminating apparatus and photo-excited process apparatus using

Impurity doping apparatus

Impurity doping apparatus

Increasing the sensitivity of an in-situ particle monitor

Independent gas feeds in a plasma reactor

Independent radiant gas preheating for precursor...

Indirect plasmatron

Induction heated pancake epitaxial reactor

Induction heating devices and methods for controllably...

Inductive heating arrangement for evaporating thin film alloy on

Inductive plasma processor having coil with plural windings...

Inductively coupled HDP-CVD reactor

Inductively coupled parallel-plate plasma reactor with a...

Inductively coupled plasma chemical vapor deposition apparatus

Inductively coupled plasma powder vaporization for fabricating i

Inductively coupled source for deriving substantially uniform pl

Installation for depositing thin layers in the reactive vapor ph