Illuminating apparatus and photo-excited process apparatus using

Details Illuminating apparatus and photo-excited process apparatus using Illuminating apparatus and photo-excited process apparatus using

1992-03-19

1993-06-29

Hearn, Brian E.

Coating apparatus

Gas or vapor deposition

With treating means

118723, 427582, 362299, 362346, 359851, 359855, C23C 1648

Patent

active

052230392

ABSTRACT:
An illuminating apparatus includes a light source section; an integrator section for spreading out and making uniform light generated from the light source; and a collimator lens for making the light which is spread out and made uniform by the integrator section a parallel light flux, wherein the integrator section is formed of a reflecting member for reflecting light generated from the light source section toward the collimator lens. A photo-excited process apparatus includes a pressure reduceable vacuum chamber; an exhaust device connected to the vacuum chamber; a gas supplying device for supplying gas used in a photo-excited process into the vacuum chamber; and an illuminating device for applying light to the gas, wherein the illuminating device includes a light source section, an integrator section for spreading out and making uniform light generated from the light source section, and a collimator lens for making light which is spread out and made uniform a parallel light flux, and the integrator section is formed of a reflecting member for reflecting the light generated from the light source section toward the collimator lens.

REFERENCES:
patent: 4202605 (1980-05-01), Heinz
patent: 4289380 (1981-09-01), Tucker
Stanley L. Ream, "Convex Beam Integrator", Laser Focus, vol. 15, No. 11, Nov. 1979, pp. 68-71.

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