Inductive heating arrangement for evaporating thin film alloy on

Details Inductive heating arrangement for evaporating thin film alloy on Inductive heating arrangement for evaporating thin film alloy on

1980-12-29

1983-09-27

Hoffman, James R.

Coating apparatus

Gas or vapor deposition

With treating means

118723, 118726, C23C 1312

Patent

active

044062524

ABSTRACT:
The invention is a thin film alloy source utilizing a supply of alloy wire selected for deposition onto a substrate. The wire is advanced through an induction heating means at a controlled rate for evaporation onto the substrate. Detection of the meniscus height or temperature of the end of the wire being evaporated yields a control signal for operating the control wire feed mechanism for advancing the wire at a rate to provide a predetermined coating thickness.

REFERENCES:
patent: 2584660 (1952-02-01), Bancroft
patent: 4237148 (1980-12-01), Aichert et al.

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