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Non-conductive alignment member for uniform plasma processing of

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Non-contact cool-down station for wafers

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Nozzle-injector for arc plasma deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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