Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2005-05-24
2005-05-24
Mills, Gregory (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S728000, C219S634000, C219S638000, C156S345520
Reexamination Certificate
active
06896738
ABSTRACT:
A heating device for controllably heating an article defines a processing chamber to hold the article and includes a housing and an EMF generator. The housing includes a susceptor portion surrounding at least a portion of the processing chamber, and a conductor portion interposed between the susceptor portion and the processing chamber. The EMF generator is operable to induce eddy currents within the susceptor portion such that substantially no eddy currents are induced in the conductor portion. The conductor portion is operative to conduct heat from the susceptor portion to the processing chamber. The heating device may further include a platter and an opening defined in the conductor portion, wherein the opening is interposed between the susceptor portion and the platter.
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Paisley Michael James
Sumakeris Joseph John
Cree Inc.
Kackar Ram
Mills Gregory
Myers Bigel & Sibley & Sajovec
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