Igniter for microwave energized plasma processing apparatus

Details Igniter for microwave energized plasma processing apparatus Igniter for microwave energized plasma processing apparatus

1992-09-04

1993-12-28

Hearn, Brian E.

Coating apparatus

Gas or vapor deposition

With treating means

118723ME, 118715, 156345, 31511121, 20429838, C23C 1650, H01L 2100

Patent

active

052735877

ABSTRACT:
An igniter for a plasma processing apparatus comprises a hollow, at least partially microwave transmissive, body having a gas inlet and gas outlet passing therethrough. The geometry of the inlet and outlet are selected so that the outlet provides a greater impedance to gas flow than does the inlet. In this manner, there is provided a high pressure region in the igniter in which plasma ignition is facilitated. Ionized species generated in the igniter function to initiate plasma formation externally of the igniter.

REFERENCES:
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patent: 4673456 (1987-06-01), Spencer et al.
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patent: 4785763 (1988-11-01), Saitoh
patent: 4888088 (1989-12-01), Slomowitz
patent: 4965540 (1990-10-01), Sullivan
patent: 4986214 (1991-01-01), Zumoto et al.
patent: 5024182 (1991-06-01), Kobayashi et al.

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