4. Coating apparatus
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Barrel type susceptor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Batch-type remote plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Batch-type remote plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Bias ECR plasma CVD apparatus comprising susceptor, clamp, and c

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Biased ion beam deposition of high density carbon

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Bonded silicon carbide parts in a plasma reactor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Branching RF antennas and plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Bypass gas feed system and method to improve reactant gas...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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