Wafer area pressure control for plasma confinement

Wafer cooling device

Wafer electrical discharge control by wafer lifter system

Wafer flattening system

Wafer holder for semiconductor manufacturing apparatus and...

Wafer holder for semiconductor manufacturing apparatus,...

Wafer holder with peripheral lift ring

Wafer holder with stiffening rib

Wafer holding, wafer support member, wafer boat and heat...

Wafer load/unload apparatus for E-Gun evaporation process

Wafer processing apparatus having independently controllable ene

Wafer support system

Wafer transfer apparatus for use in a film deposition furnace

Wide area radio frequency plasma apparatus for processing...

Wiring repair apparatus