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Atomic layer deposition apparatus for depositing atomic layer on

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Atomic layer deposition systems and methods

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Batch processing platform for ALD and CVD

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Buffer chamber for integrating physical and chemical vapor...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Can coating system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Carousel wafer transfer system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Carousel wafer transfer system

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Chamber, at least for the transport of workpieces, a chamber...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition reaction apparatus having isolated rea

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition reactor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition reactor and process chamber for...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Chemical vapor deposition system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition under a single reactor vessel divided

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor phase growth method and chemical vapor phase grow

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Cluster tool for fabricating semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
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