Can coating system

Details Can coating system Can coating system

1997-06-06

1999-06-08

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118726, C23C 1600

Patent

active

059102195

ABSTRACT:
A coating apparatus is provided which comprises a can defining an internal chamber. A hollow sleeve which itself defines an internal space is located within the chamber. The hollow sleeve defines with the can an annular space. A plurality of perforations are located in the wall of the hollow sleeve for communicating the annular space with the internal space defined by the sleeve. A lid for enclosing the can and the hollow sleeve is secured to the can for forming a closed compartment.

REFERENCES:
patent: 5308399 (1994-05-01), Pillhoefer
patent: 5439525 (1995-08-01), Peichl

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