Treatment system and treatment apparatus with multi-stage carrie

Details Treatment system and treatment apparatus with multi-stage carrie Treatment system and treatment apparatus with multi-stage carrie

1996-03-25

1998-12-29

Kunemund, Robert

Coating apparatus

Gas or vapor deposition

Multizone chamber

118715, 432241, 414940, C23C 1600

Patent

active

058534865

ABSTRACT:
A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and a first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply pipe and an exhaust pipe are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A open/close valve device is provided for each of the inert gas supply pipes and the exhaust pipes.

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