Treatment system including a plurality of treatment apparatus

Details Treatment system including a plurality of treatment apparatus Treatment system including a plurality of treatment apparatus

1994-03-14

1996-06-18

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Multizone chamber

432152, 432241, 414940, 901 7, 901 14, 901 18, C23C 1600, F27D 312, B65G 4907, B25J 1100

Patent

active

055273904

ABSTRACT:
A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and a first air-tight carrier storage chamber for storing the carrier. The treatment apparatus has an air-tight second carrier storage chamber. An inert gas supply pipe and an exhaust pipe are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. An open/close valve and an open/close device are connected to each of the inert gas supply pipes and the exhaust pipes.

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