Tandem process chamber

Details Tandem process chamber Tandem process chamber

2003-10-06

2010-02-02

MacArthur, Sylvia R. (Department: 1792)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C156S345220

Reexamination Certificate

active

07655092

ABSTRACT:
The present invention provides an apparatus for vacuum processing generally comprising an enclosure having a plurality of isolated chambers formed therein, a gas distribution assembly disposed in each processing chamber, a gas source connected to the plurality of isolated chambers, and a power supply connected to each gas distribution assembly.

REFERENCES:
patent: 4065369 (1977-12-01), Ogawa et al.
patent: 4423303 (1983-12-01), Hirose et al.
patent: 4553069 (1985-11-01), Purser
patent: 4756815 (1988-07-01), Turner et al.
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4785962 (1988-11-01), Toshima
patent: 4804431 (1989-02-01), Ribner
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4886570 (1989-12-01), Davis et al.
patent: 4902099 (1990-02-01), Okamoto et al.
patent: 4908095 (1990-03-01), Kagatsume et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 4923584 (1990-05-01), Bramhall, Jr. et al.
patent: 4962726 (1990-10-01), Matsushita et al.
patent: 4966519 (1990-10-01), Davis et al.
patent: 4986715 (1991-01-01), Asakawa
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5120019 (1992-06-01), Davis, Jr.
patent: 5133284 (1992-07-01), Thomas et al.
patent: 5147175 (1992-09-01), Tada
patent: 5147724 (1992-09-01), Eschwey et al.
patent: 5162047 (1992-11-01), Wada et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5239182 (1993-08-01), Tateyama et al.
patent: 5261935 (1993-11-01), Ishii et al.
patent: 5275303 (1994-01-01), Szalai
patent: 5281274 (1994-01-01), Yoder
patent: 5288379 (1994-02-01), Namiki et al.
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5297910 (1994-03-01), Yoshioka et al.
patent: 5302209 (1994-04-01), Maeda et al.
patent: 5330301 (1994-07-01), Brancher
patent: 5344542 (1994-09-01), Maher et al.
patent: 5349154 (1994-09-01), Harker et al.
patent: 5355066 (1994-10-01), Lowrance
patent: 5359177 (1994-10-01), Taki et al.
patent: 5363872 (1994-11-01), Lorimer
patent: 5372471 (1994-12-01), Wu
patent: 5379984 (1995-01-01), Coad et al.
patent: 5388944 (1995-02-01), Takanabe et al.
patent: 5391035 (1995-02-01), Krueger
patent: 5405230 (1995-04-01), Ono et al.
patent: 5415729 (1995-05-01), Strasser et al.
patent: 5452521 (1995-09-01), Niewmierzycki
patent: 5469035 (1995-11-01), Lowrance
patent: 5494494 (1996-02-01), Mizuno et al.
patent: 5501739 (1996-03-01), Yamada et al.
patent: 5505779 (1996-04-01), Mizuno et al.
patent: 5505799 (1996-04-01), Makowiecki
patent: 5513946 (1996-05-01), Sawada et al.
patent: 5515986 (1996-05-01), Turlot et al.
patent: 5525160 (1996-06-01), Tanaka et al.
patent: 5551982 (1996-09-01), Anderson et al.
patent: 5558717 (1996-09-01), Zhao et al.
patent: 5558751 (1996-09-01), Mahler et al.
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5562387 (1996-10-01), Ishii et al.
patent: 5565034 (1996-10-01), Nanbu et al.
patent: 5604443 (1997-02-01), Kitamura et al.
patent: 5611655 (1997-03-01), Fukasawa et al.
patent: 5611861 (1997-03-01), Higashi
patent: 5616208 (1997-04-01), Lee
patent: 5624536 (1997-04-01), Wada et al.
patent: 5642978 (1997-07-01), Lahne et al.
patent: 5645391 (1997-07-01), Ohsawa et al.
patent: 5647724 (1997-07-01), Davis, Jr. et al.
patent: 5655060 (1997-08-01), Lucas
patent: 5658114 (1997-08-01), Mahler
patent: 5664926 (1997-09-01), Sussman et al.
patent: 5674039 (1997-10-01), Walker et al.
patent: 5708755 (1998-01-01), Gronet et al.
patent: 5709519 (1998-01-01), Uehara et al.
patent: 5725352 (1998-03-01), Tanaka
patent: 5755888 (1998-05-01), Torii et al.
patent: 5798016 (1998-08-01), Oehrlein et al.
patent: 5801945 (1998-09-01), Comer
patent: 5838121 (1998-11-01), Fairbairn et al.
patent: 5844195 (1998-12-01), Fairbairn et al.
patent: 5855681 (1999-01-01), Maydan et al.
patent: 5862823 (1999-01-01), Kamikawa et al.
patent: 5885356 (1999-03-01), Zhao et al.
patent: 5902088 (1999-05-01), Fairbairn et al.
patent: 5905302 (1999-05-01), Lane et al.
patent: 5909994 (1999-06-01), Blum et al.
patent: 5911834 (1999-06-01), Fairbairn et al.
patent: 5961269 (1999-10-01), Kroeker
patent: 5976259 (1999-11-01), Yamazaki
patent: 6002971 (1999-12-01), Lucas
patent: 6017396 (2000-01-01), Okamoto
patent: 6077157 (2000-06-01), Fairbairn et al.
patent: 6082950 (2000-07-01), Altwood et al.
patent: 6152070 (2000-11-01), Fairbairn et al.
patent: 6214120 (2001-04-01), Kim
patent: 6224312 (2001-05-01), Sundar
patent: 6228439 (2001-05-01), Watanabe et al.
patent: 6246923 (2001-06-01), Sugimura et al.
patent: 6368051 (2002-04-01), Raaijmakers
patent: 6635115 (2003-10-01), Fairbairn et al.
patent: 6858085 (2005-02-01), Nguyen et al.
patent: 2002/0195056 (2002-12-01), Sandhu et al.
patent: 44 12 915 (1994-11-01), None
patent: 0 246 453 (1987-11-01), None
patent: 0 342 279 (1989-11-01), None
patent: 0 398 365 (1990-11-01), None
patent: 0 556 865 (1993-08-01), None
patent: 2 589 839 (1987-05-01), None
patent: 55-343 (1980-01-01), None
patent: 60-98628 (1985-06-01), None
patent: 63230880 (1988-09-01), None
patent: 2 52128 (1990-02-01), None
patent: 3019252 (1991-01-01), None
patent: 03 136779 (1991-06-01), None
patent: 03-232981 (1991-10-01), None
patent: A 02-265827 (1991-10-01), None
patent: A 03-241853 (1991-10-01), None
patent: A 03-273606 (1991-12-01), None
patent: 4 186861 (1992-07-01), None
patent: A 04-321253 (1992-11-01), None
patent: 5166733 (1993-07-01), None
patent: 06 015592 (1994-01-01), None
patent: A 07-029963 (1995-01-01), None
patent: 07-088188 (1995-03-01), None
patent: A 07-153818 (1995-06-01), None
patent: A 07-226429 (1995-08-01), None
patent: A 07-302828 (1995-11-01), None
patent: A 07-321178 (1995-12-01), None
patent: HEI 7 321178 (1995-12-01), None
patent: 08-055842 (1996-02-01), None
patent: 8074028 (1996-03-01), None
patent: 08-111381 (1996-04-01), None
patent: 08-178169 (1996-07-01), None
patent: A 08-288356 (1996-11-01), None
patent: H09-163 (1997-01-01), None
patent: 09-153465 (1997-06-01), None
patent: 09-285982 (1997-11-01), None
patent: 10004326 (1998-01-01), None
patent: 07-321178 (1998-12-01), None
patent: 1994-20491 (1994-09-01), None
patent: 95 14555 (1995-06-01), None
patent: WO-97/26117 (1997-07-01), None
Korean Intellectual Property Office, Notice to File a Response, dated Dec. 9, 2004 (English translation).
Korean Intellectual Property Office, Notice to File a Response, dated Feb. 2, 2005, Application No. 10-1997-0060326.
Korean Intellectual Property Office, Notice to File a Response, dated Feb. 3, 2005, Application No. 10-1997-0060327.
Korean Intellectual Property Office, Notice to File A Response, dated Jan. 29, 2005, Application No. 10-1997-0060325.
Second Notice to File a Response dated Jul. 11, 2005 for Korean Patent Application No. 1997-60325.
Office Action dated Jun. 26, 2007 of the counterpart foreign application (Reference No. P97AM-115) from Japanese Foreign Patent Office.
Office Action dated Aug. 14, 2007 of the counterpart foreign application No. PH09-313886 from Japanese Foreign Patent Office, (Reference No. P97AM.115).
Office Action for Japanese Patent Application No. PH09-315458 dated Aug. 8, 2007.
Office Action for Japanese Patent Application No. PH09-313899 dated Oct. 2, 2007.
Japanese Office Action dated Jan. 8, 2008 for Patent Application No. PH09-315474.
Shiller, Z., et al., “Robot Path Planning with Obstacles, Actuator, Gripper, and Payload Constraints”, The International Journal of Robotics Research, vol. 8, No. 6, Dec. 1989, pp. 3-18.
Shiller, Z., et al., “Computation of Path Constrained Time Optimal Motions with Dynamic Singularities”, Transactions of the ASME, Journal of Dynamic Systems, Measurement, and Control, Mar. 1992, vol. 114, pp. 34-40.
Novellus Brochure, Novellus Offerings, Solutions, 12 pages.
Mattson Technology Brochure, 22 pages.
EP Search Report for Application No. EP 97 11 8440 dated Jan. 5, 1999.
Slotine, J., et al., “Improving the Efficiency of Time-Optimal Path-Flowing Algorithms”, IEEE Transactions on Robotics and Automation, vol. 5, No. 1, Feb. 1989, pp. 118-124.
Webster's Third New

Affiliated with

Also associated with

Rating

Tandem process chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Tandem process chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tandem process chamber will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4180926