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Adhesion apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus and method for hermetically sealing a chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus and method for sealing a vacuum chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Apparatus and method for web cooling in a vacuum coating...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Apparatus for fabricating semiconductor devices

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus for thermal treatment of semiconductors

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus for thermal treatment of semiconductors

Coating apparatus – Gas or vapor deposition – Chamber seal
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Apparatus for treatment using gas

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Automatic positive pressure seal access door

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Bell of opaque fused silica

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Cap-mounting mechanism for apparatus for thermal treatment of se

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Chamber for chemical vapor deposition

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Closure for thermal reactor

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Compliant wafer chuck

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Continuous vacuum vapor deposition system having reduced pressur

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Cooling element for a semiconductor fabrication chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Cylinder-based plasma processing system

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Decompression container

Coating apparatus – Gas or vapor deposition – Chamber seal
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Decompression container

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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