4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal
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Managing work-piece deflection

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Method and apparatus for removing external components from a...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Method and apparatus for sealing substrate load port in a...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Method and apparatus for vacuum deposition plating

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Mobile injector system

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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