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Adhesion apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus and method for hermetically sealing a chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus and method for sealing a vacuum chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Apparatus and method for web cooling in a vacuum coating...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Apparatus for fabricating semiconductor devices

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus for thermal treatment of semiconductors

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus for thermal treatment of semiconductors

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Apparatus for treatment using gas

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Automatic positive pressure seal access door

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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