4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal
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Thermal cycle resistant seal and method of sealing for use with

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Thermal processing apparatus for substrate employing...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Two-piece slit valve insert for vacuum processing system

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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