4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal
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Reaction apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Reactor for manufacturing a semiconductor device

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Reactors with isolated gas connectors and methods for...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Reduced pressure and normal pressure treatment apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Rigid gas collector for providing an even flow of gasses

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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