Cap-mounting mechanism for apparatus for thermal treatment of se

Details Cap-mounting mechanism for apparatus for thermal treatment of se Cap-mounting mechanism for apparatus for thermal treatment of se

1980-03-04

1981-05-12

Kaplan, Morris

Coating apparatus

Gas or vapor deposition

Chamber seal

C23C 1308

Patent

active

042665078

ABSTRACT:
In an apparatus for thermal treatment of semiconductors, a substantially spherical portion of a cap for a tube is confined between distal ends of a plurality of members and distal ends of a plurality of springs, whereby problems arising from angular deviation are overcome. The framework supporting the cap confining means is biased toward the tube.

REFERENCES:
patent: 4018184 (1977-04-01), Nagasawa et al.
patent: 4154192 (1979-05-01), Tsubouchi et al.
patent: 4167915 (1979-09-01), Toole et al.

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