Cylinder-based plasma processing system

Details Cylinder-based plasma processing system Cylinder-based plasma processing system

2007-01-23

2007-01-23

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

Chamber seal

C118S715000, C156S345100, C029S525020, C029S700000, C029S282000

Reexamination Certificate

active

10476883

ABSTRACT:
A method and system for reducing the cost of a vacuum processing system by utilizing separately fabricated parts for the walls and the tops and bottoms of chambers. Walls are formed from cylinders (e.g., aluminum tubing or rolled ring forgings), and plates are then hermetically sealed to the top and bottom of the cylinder. Fasteners (and the vacuum inside the chamber) clamp the plates to the cylinder.

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Rolled Ring Forging, Scot Forge, http://www.scotforge.com/sf—facts-rollring.htm.

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